Micro-Raman analysis of polysilicon membranes deposited on...

Micro-Raman analysis of polysilicon membranes deposited on porous silicon channels

H Talaat, S Negm, H.E Schaffer, G Kaltsas, A.G Nassiopoulou
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Volume:
266-269
Year:
2000
Language:
english
DOI:
10.1016/s0022-3093(99)00955-2
File:
PDF, 129 KB
english, 2000
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