Dissociative adsorption of NF3 on Si(001)-(2×1)

Surface Science 2000 Vol. 454-456; Iss. none

Dissociative adsorption of NF3 on Si(001)-(2×1)

R. Miotto, A.C. Ferraz, G.P. Srivastava
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Volume:
454-456
Year:
2000
Language:
english
DOI:
10.1016/s0039-6028(00)00163-1
File:
PDF, 166 KB
english, 2000
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