Growth of Ti and TiSi2 films on Si(111) by low energy Ti+...

Surface Science 2000 Vol. 453; Iss. 1-3

Growth of Ti and TiSi2 films on Si(111) by low energy Ti+ beam deposition

S.M Lee, E.T Ada, H Lee, J Kulik, J.W Rabalais
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Volume:
453
Year:
2000
Language:
english
DOI:
10.1016/s0039-6028(00)00339-3
File:
PDF, 625 KB
english, 2000
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