![](/img/cover-not-exists.png)
The effect of coincident atomic hydrogen on the gas-source molecular beam epitaxial growth of silicon from disilane
Y.-J. Zheng, J.R. Engstrom, J. Zhang, A. Schellinger, B.A. JoyceVolume:
470
Year:
2000
Language:
english
DOI:
10.1016/s0039-6028(00)00848-7
File:
PDF, 244 KB
english, 2000