Acetylene on Si(1 1 1): carbon incorporation in the growth of c-SiC thin layers
M De Crescenzi, R Bernardini, S Pollano, R Gunnella, P Castrucci, G Dufour, F RochetVolume:
489
Year:
2001
Language:
english
DOI:
10.1016/s0039-6028(01)01176-1
File:
PDF, 209 KB
english, 2001