The surface science of semiconductor processing: gate oxides in the ever-shrinking transistor
Marcus K Weldon, K.T Queeney, Joseph Eng Jr, Krishnan Raghavachari, Yves J ChabalVolume:
500
Year:
2002
Language:
english
DOI:
10.1016/s0039-6028(01)01585-0
File:
PDF, 1.39 MB
english, 2002