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Evidence of an implantation process in carbon deposition on Si(100) at high substrate temperature by laser ablation
J.A. Martín-Gago, F. Comin, S. FerrerVolume:
369
Year:
1996
Language:
english
DOI:
10.1016/s0039-6028(96)00746-7
File:
PDF, 595 KB
english, 1996