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Surface reaction mechanisms on Si(111)-(7 × 7) during silane UHV-CVD
F. Thibaudau, D. Albertini, L. Masson, F. SalvanVolume:
385
Year:
1997
Language:
english
DOI:
10.1016/s0039-6028(97)00260-4
File:
PDF, 549 KB
english, 1997