Gas source homoepitaxy on Si(113) – the interrelation of...

Gas source homoepitaxy on Si(113) – the interrelation of H-induced reconstructions and growth morphology

V. Dorna, Z. Wang, U. Köhler
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Volume:
401
Year:
1998
Language:
english
DOI:
10.1016/s0039-6028(98)00071-5
File:
PDF, 163 KB
english, 1998
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