A novel detection system for defects and chemical contamination in semiconductors based upon the Scanning Kelvin Probe
B. Lägel, I.D. Baikie, U. PetermannVolume:
433-435
Year:
1999
Language:
english
DOI:
10.1016/s0039-6028(99)00025-4
File:
PDF, 115 KB
english, 1999