Nano-lithography with atoms

Nano-lithography with atoms

A.S Bell, B Brezger, U Drodofsky, S Nowak, T Pfau, J Stuhler, Th Schulze, J Mlynek
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Volume:
433-435
Year:
1999
Language:
english
DOI:
10.1016/s0039-6028(99)00083-7
File:
PDF, 794 KB
english, 1999
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