Growth and properties of alumina films obtained by...

Thin Solid Films 2001 Vol. 398-399; Iss. none

Growth and properties of alumina films obtained by low-pressure metal–organic chemical vapor deposition

Dong-Hau Kuo, Bo-Yu Cheung, Ren-Jye Wu
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Volume:
398-399
Year:
2001
Language:
english
DOI:
10.1016/s0040-6090(01)01300-1
File:
PDF, 920 KB
english, 2001
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