Etch characteristics of SrBi2Ta2O9 (SBT) thin films using...

Thin Solid Films 2001 Vol. 398-399; Iss. none

Etch characteristics of SrBi2Ta2O9 (SBT) thin films using magnetized inductively coupled plasmas

Young-Joon Lee, Chang-Hyun Jeong, Jeong-Woon Bae, In-Kyu You, Jong-Wan Park, Geun-Young Yeom
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Volume:
398-399
Year:
2001
Language:
english
DOI:
10.1016/s0040-6090(01)01371-2
File:
PDF, 267 KB
english, 2001
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