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Preparation of Ti/N and Ag/TiNx multilayers by plasma based ion implantation with multi-targets unbalanced magnetron sputtering
Xinxin Ma, Xiaodong Li, Yue Sun, Lifang Xia, Mingren Sun, Guang LiVolume:
44
Year:
2000
Language:
english
DOI:
10.1016/s0167-577x(00)00021-5
File:
PDF, 137 KB
english, 2000