Plasma-enhanced chemical vapor deposition of PbTiO3 thin...

Plasma-enhanced chemical vapor deposition of PbTiO3 thin films

Maosong Tong, Guorui Dai, Dingsan Gao
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Volume:
46
Year:
2000
Language:
english
DOI:
10.1016/s0167-577x(00)00143-9
File:
PDF, 218 KB
english, 2000
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