![](/img/cover-not-exists.png)
Phosphorous doping in beta-irondisilicide by co-sputtering method
Takashi Ehara, Shuichi Naito, Shinji Nakagomi, Yoshihiro KokubunVolume:
56
Year:
2002
Language:
english
DOI:
10.1016/s0167-577x(02)00531-1
File:
PDF, 103 KB
english, 2002