Diamond-like carbon gradient film prepared by unbalanced...

Materials Letters 2002 Vol. 57; Iss. 1

Diamond-like carbon gradient film prepared by unbalanced magnetron sputtering and plasma immersion ion implantation hybrid technique

Feng Ma, Gang Li, Heqing Li, Hongtao Ma, Xun Cai
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Volume:
57
Year:
2002
Language:
english
DOI:
10.1016/s0167-577x(02)00703-6
File:
PDF, 141 KB
english, 2002
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