Silicon carbide epitaxial layer growths on Acheson seed...

Silicon carbide epitaxial layer growths on Acheson seed crystals from silicon melt

M. Nasir Khan, Shin-ichi Nishizawa, Tomohisa Kato, Ryoji Kosugi, Kazuo Arai
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Volume:
57
Year:
2002
Language:
english
DOI:
10.1016/s0167-577x(02)00783-8
File:
PDF, 381 KB
english, 2002
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