p-type ZnO films deposited by DC reactive magnetron...

p-type ZnO films deposited by DC reactive magnetron sputtering at different ammonia concentrations

Jianguo Lu, Yinzhu Zhang, Zhizhen Ye, Lei Wang, Binghui Zhao, Jinhyun Huang
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Volume:
57
Year:
2003
Language:
english
DOI:
10.1016/s0167-577x(03)00054-5
File:
PDF, 192 KB
english, 2003
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