Studies on silicon-on-insulator-multilayer structures...

Materials Letters 2004 Vol. 58; Iss. 3-4

Studies on silicon-on-insulator-multilayer structures prepared by epitaxial layer transfer

Xinyun Xie, Qing Lin, Weili Liu, Chenglu Lin
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Volume:
58
Year:
2004
Language:
english
DOI:
10.1016/s0167-577x(03)00526-3
File:
PDF, 430 KB
english, 2004
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