A new process for the fabrication of silicon-on-insulator...

A new process for the fabrication of silicon-on-insulator structures by using porous silicon

Chunk Cheng Chang, Lai Cheuan Chen
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Volume:
32
Year:
1997
Language:
english
DOI:
10.1016/s0167-577x(97)00047-5
File:
PDF, 300 KB
english, 1997
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