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Effects of oxygen on selective silicon deposition using disilane
Patricia A. O'Neil, Mehmet C. Öztürk, Alan D. Batchelor, Dennis M. MaherVolume:
38
Year:
1999
Language:
english
DOI:
10.1016/s0167-577x(98)00200-6
File:
PDF, 295 KB
english, 1999