Novel Parylene-N films deposited at liquid nitrogen...

Novel Parylene-N films deposited at liquid nitrogen temperatures

James Erjavec, John Sikita, Stephen P Beaudoin, Gregory B Raupp
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Volume:
39
Year:
1999
Language:
english
DOI:
10.1016/s0167-577x(99)00031-2
File:
PDF, 293 KB
english, 1999
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