Synthesis of Poly(methyl-co-trifluoropropyl)silsesquioxanes and Their Thin Films for Low Dielectric Application
Jingyu Hyeon-Lee, Woon Chun Kim, Sung Kyu Min, Hee-Woo Ree, Do Y. YoonVolume:
288
Year:
2003
Language:
english
Pages:
7
DOI:
10.1002/mame.200390042
File:
PDF, 118 KB
english, 2003