Electrospray Deposition of Photoresist: A Low Impact Method for the Fabrication of Multilayered Films
Ivo B. Rietveld, Naotoshi Suganuma, Kei Kobayashi, Hirofumi Yamada, Kazumi MatsushigeVolume:
293
Year:
2008
Language:
english
Pages:
13
DOI:
10.1002/mame.200700419
File:
PDF, 434 KB
english, 2008