Novel Molecular Resist Based on a First Generation...

Novel Molecular Resist Based on a First Generation Dendrimer Possessing Furan Rings

Hajime Mori, Eisaku Nomura, Asao Hosoda, Yasuhito Miyake, Hisaji Taniguchi
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Volume:
27
Year:
2006
Language:
english
Pages:
5
DOI:
10.1002/marc.200600454
File:
PDF, 165 KB
english, 2006
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