Untersuchung von Hartstoffschichten aus der...

Materialwissenschaft und Werkstofftechnik 1993 Vol. 24; Iss. 3-4

Untersuchung von Hartstoffschichten aus der HF-Kathodenzerstäubung

Dr. F. Stobiecki, Dr. T. Stobiecki, Prof. Dr. K. Röll, Dipl.-Ing. J. Zendehroud, Dr. K. Thoma, Prof. Dr. H. Gärtner
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Volume:
24
Year:
1993
Language:
german
Pages:
7
DOI:
10.1002/mawe.19930240308
File:
PDF, 653 KB
german, 1993
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