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High-resolution electron beam lithography of PMMA derivatives with Langmuir-Blodgett films
Chang Nam Kim, Dong Woo Kang, Eung Ryul Kim, Haiwon LeeVolume:
85
Year:
1997
Language:
english
DOI:
10.1016/s0379-6779(97)80295-0
File:
PDF, 271 KB
english, 1997