Impact of Device Technology Processes on the Surface...

Materialwissenschaft und Werkstofftechnik 2006 Vol. 37; Iss. 11

Impact of Device Technology Processes on the Surface Properties and Biocompatibility of Group III Nitride Based Sensors

I. Cimalla, F. Will, K. Tonisch, M. Niebelschütz, V. Cimalla, V. Lebedev, G. Kittler, M. Himmerlich, S. Krischok, J. A. Schaefer, M. Gebinoga, A. Schober, T. Friedrich, O. Ambacher
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Volume:
37
Year:
2006
Language:
english
Pages:
5
DOI:
10.1002/mawe.200600078
File:
PDF, 231 KB
english, 2006
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