X-ray study of silicon crystal structure changes due to implantation with fast nitrogen ions
D. Żymierska, J. Auleytner, K. Godwod, J. Domagała, L. Datsenko, J. ChoińskiVolume:
328
Year:
2001
Language:
english
DOI:
10.1016/s0925-8388(01)01300-7
File:
PDF, 294 KB
english, 2001