Strain in hydrogen and oxygen implanted silicon and SOI...

Journal of Alloys and Compounds 2001 Vol. 328; Iss. 1-2

Strain in hydrogen and oxygen implanted silicon and SOI structures annealed at high pressure

J. Bak-Misiuk, I.V. Antonova, A. Misiuk, J. Domagala, V.P. Popov, V.I. Obodnikov, J. Härtwig, A. Romano-Rodriguez, A. Bachrouri
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Volume:
328
Year:
2001
Language:
english
DOI:
10.1016/s0925-8388(01)01344-5
File:
PDF, 469 KB
english, 2001
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