Nanostructure of near-surface Si layers formed by implantation and pulsed laser annealing
D. Klinger, J. Auleytner, D. Żymierska, L. NowickiVolume:
362
Year:
2004
Language:
english
DOI:
10.1016/s0925-8388(03)00599-1
File:
PDF, 172 KB
english, 2004