Formation of CeSi2 on the Si surface upon high current pulsed Ce-ion implantation
X.Q. Cheng, X.J. Tang, B.X. LiuVolume:
365
Year:
2004
Language:
english
DOI:
10.1016/s0925-8388(03)00679-0
File:
PDF, 246 KB
english, 2004