Atomistic comparative study of VUV photodeposited silicon nitride on InP(1 0 0) by simulation and atomic force microscopy: discrete representation and topological analysis
J Flicstein, E Guillonneau, J Marquez, L.S How Kee Chun, D Maisonneuve, C David, Zh.Zh Wang, J.F Palmier, J.L CourantVolume:
17
Year:
2000
Language:
english
DOI:
10.1016/s0927-0256(00)00082-3
File:
PDF, 1.04 MB
english, 2000