Numerical study of SiC CVD in a vertical cold-wall reactor

Computational Materials Science 2002 Vol. 24; Iss. 4

Numerical study of SiC CVD in a vertical cold-wall reactor

A.N. Vorob'ev, S.Yu. Karpov, M.V. Bogdanov, A.E. Komissarov, O.V. Bord, A.I. Zhmakin, Yu.N. Makarov
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
24
Year:
2002
Language:
english
DOI:
10.1016/s0927-0256(02)00220-3
File:
PDF, 888 KB
english, 2002
Conversion to is in progress
Conversion to is failed