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Experimental studies of the initial diffusion stage in semiconductors
A.V. Kamanin, L.A. Busygina, E.G. Guk, Yu.A. Kudryavtsev, I.A. Mokina, N.M. Shmidt, V.B. Shuman, T.A. YurreVolume:
11
Year:
1998
Language:
english
DOI:
10.1016/s0927-0256(97)00201-2
File:
PDF, 86 KB
english, 1998