Manufacturing and structure investigation of TiN-Al2O3-multilayers
H.-D Bauer, B Arnold, K Bartsch, R Rennekamp, A LeonhardtVolume:
11
Year:
1999
Language:
english
DOI:
10.1016/s0965-9773(99)00400-6
File:
PDF, 659 KB
english, 1999