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Characterization of ultra-thin Y2O3 films as insulator of MFISFET structure
Ming-hua TANG, Yi-chun ZHOU, Xue-jun ZHENG, Zhi YAN, Chuan-pin CHENG, Zhi YE, Zeng-shun HUVolume:
16
Year:
2006
Language:
english
DOI:
10.1016/s1003-6326(06)60143-x
File:
PDF, 320 KB
english, 2006