Effect of process parameters on electrical, optical properties of IZO films produced by inclination opposite target type DC magnetron sputtering
Do-Hoon SHIN, Yun-Hae KIM, Joong-Won HAN, Kyung-Man MOON, Ri-Ichi MURAKAMIVolume:
19
Year:
2009
Language:
english
DOI:
10.1016/s1003-6326(08)60394-5
File:
PDF, 510 KB
english, 2009