Effects of nitrogen content on structure and electrical properties of nitrogen-doped fluorinated diamond-like carbon films
Jian-rong XIAO, Xin-hai LI, Zhi-xing WANGVolume:
19
Year:
2009
Language:
english
DOI:
10.1016/s1003-6326(09)60068-6
File:
PDF, 408 KB
english, 2009