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Grid and substrate bias effects on mechanical properties of diamond films prepared by HFCVD
Feng XU, Dun-wen ZUO, Wen-zhuang LU, Yong-wei ZHU, Min WANGVolume:
19
Year:
2009
Language:
english
DOI:
10.1016/s1003-6326(10)60139-2
File:
PDF, 721 KB
english, 2009