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Fabrication of curved micro structures on photoresist layer
Jae Sung YOON, Tae-Jin JE, Doo-Sun CHOI, Sung Hwan CHANG, Kyung-Hyun WHANGVolume:
21
Year:
2011
Language:
english
DOI:
10.1016/s1003-6326(11)61070-4
File:
PDF, 710 KB
english, 2011