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Influence of Nitrogen Flow Rate on the Microstructure and Properties of N and Me (Me=Cr, Zr) Co-doped Diamond-like Carbon Films
Zhiyun Han, Hongkai Li, Guoqiang Lin, Chuang DongVolume:
26
Year:
2010
Language:
english
DOI:
10.1016/s1005-0302(10)60157-0
File:
PDF, 496 KB
english, 2010