Diagnosis of gas phase near the substrate surface in...

Journal of University of Science and Technology Beijing, Mineral, Metallurgy, Material 2007 Vol. 14; Iss. 4

Diagnosis of gas phase near the substrate surface in diamond film deposition by high-power DC arc plasma jet CVD

Zuyuan Zhou, Guangchao Chen, Bin Li, Weizhong Tang, Fanxiu Lv
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Volume:
14
Year:
2007
Language:
english
DOI:
10.1016/s1005-8850(07)60072-3
File:
PDF, 381 KB
english, 2007
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