New developments in MEMS using SiC and TiNi shape memory...

Current Opinion in Solid State & Materials Science 1997 Vol. 2; Iss. 5

New developments in MEMS using SiC and TiNi shape memory alloy materials

Christian A Zorman, Mehran Mehregany, Harold Kahn, Arthur H Heuer
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Volume:
2
Year:
1997
Language:
english
DOI:
10.1016/s1359-0286(97)80046-0
File:
PDF, 678 KB
english, 1997
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