A feasibility study of ZnO-based FBAR devices for an ultra-mass-sensitive sensor application
Linh Mai, Dong-Hyun Kim, Munhyuk Yim, Giwan YoonVolume:
42
Year:
2004
Language:
english
Pages:
3
DOI:
10.1002/mop.20351
File:
PDF, 131 KB
english, 2004