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Post-CMOS micromachined nickel tunable-capacitors with a large tuning-range under low actuating voltage
Lei Gu, Zhengzheng Wu, Xinxin LiVolume:
50
Year:
2008
Language:
english
Pages:
4
DOI:
10.1002/mop.23645
File:
PDF, 173 KB
english, 2008