Micromachined 50 GHz/60 GHz Phi filters by CMOS compatible ICP deep trench technology
Pen-Li Huang, Tao Wang, Yo-Sheng Lin, Shey-Shi Lu, Yu-Ming Teng, Guo-Wei HuangVolume:
50
Year:
2008
Language:
english
Pages:
5
DOI:
10.1002/mop.23915
File:
PDF, 703 KB
english, 2008