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The RF characteristics of micromachined coplanar waveguide in 0.13 μm CMOS technology by CMOS compatible ICP dry etching
Tao Wang, Shey-Shi Lu, Yo-Sheng Lin, Yin-Zong Juang, Guo-Wei HuangVolume:
51
Year:
2009
Language:
english
Pages:
4
DOI:
10.1002/mop.24693
File:
PDF, 242 KB
english, 2009