Two-dimensional fluid model simulation of bell jar top...

IEEE Transactions on Plasma Science 1997 Vol. 25; Iss. 1

Two-dimensional fluid model simulation of bell jar top inductively coupled plasma

Han-Ming Wu, Yu, B.W., Ming Li, Yun Yang
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Volume:
25
Year:
1997
Language:
english
DOI:
10.1109/27.557479
File:
PDF, 429 KB
english, 1997
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